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平田機工: 生産設備内の空気の流れ

半導体の製造装置にはクリーン環境が求められるため、気流制御が不可欠です。平田機工では、生産装置の気流シミュレーションにSTREAMを使用しています。

半導体製造における装置には、特殊な空調管理やクリーンな環境が求められることから、空気の流れを理解・コントロールすることが重要だ。生産設備を一貫して手掛ける平田機工では、搬送機構を中心とするさまざまな生産装置に流体解析ツール「STREAM」を適用し、流れの理解やプレゼンなど様々な場面に活用している。

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